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    • 應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!

      發(fā)布日期:2025-02-05 16:02:12

      應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!

      應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!

      應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!

       

       

       

      APPLICATIONSWafergard® MAX In-line PTFE Gas Filters Applications
      • Compatible with all classes of semiconductor process gases

      • Compatible with general nitrogen and CDA applications

       

       

       

      SPECIFICATIONS

      Product Specifications
      Materials Filter element Hydrophobic PTFE membrane supported by molded PFA structures
        Housing Electropolished low sulfur 316L stainless housing
      Downstream cleanliness Particles Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm
        Volatiles (Silver) <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb)
      Removal rating ≥0.0015 μm
      Surface finish interior WGMX (Bronze) MB XXXX ≤20 μin Ra
        WGMX (Silver/Bronze Plus) MS XXX/XXX ≤7 μin Ra
      Helium leak rating Qualified 2 x 10-10 atm-cc/sec
        Tested 1 x 10-9 atm-cc/sec
      Operating conditions
       
      Maximum inlet pressure
       
      Silver and Bronze Plus 1⁄4" and 1⁄2" VCR® compatible fittings: 7.0 MPa (70 bar, 1015 psig)
          Bronze 1⁄4" and 1⁄2" VCR compatible fittings: 6.0 MPa (60 bar, 870 psig)
          Bronze and Bronze Plus 1⁄4", 3⁄8" and 1⁄2" Swagelok® compatible fitting: 6.0 MPa (60 bar, 870 psig)
        Maximum forward differential pressure 7 bar (102 psid)
        Maximum reverse differential pressure 2.5 bar (36 psid)
        Maximum operating temperature 120°C (248°F)
      Flow rating Refer to performance data
      Warranty Bronze 1 year
        Silver 3 years
      Particle retention Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size)

       

       

       Wafergard MAX In-line PTFE Gas Filters
      SLIDE DETAILS.
      Download Image
      These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications.
      PTFE filter element excels in ultrapure applications 
      Designed for high-flow and low-delta pressure applications 
      For use with inert and reactive gases, including ozone 
      Pre-conditioned for fast startup (silver only) 
      PART NUMBERS
      Wafergard MAX In-line PTFE Gas Filters Part Numbers
      PART NUMBER FITTING SIZE AND TYPE LENGTH
      WGMXMBPRF2 1/4" male VCR inlet, 1/4" female VCR outlet 141.2 mm (5.6")
      WGMXMBRR2 1/4" male VCR127 mm (5.00")
      WGMXMBRR4 1/2" male VCR127 mm (5.00")
      WGMXMBSS2 1/4" Swagelok112.7 mm (4.44")
      WGMXMBSS3 3/8" Swagelok117.9 mm (4.64)
      WGMXMBSS4 1/2" Swagelok118.7 mm (4.67")
      WGMXMPRR2 1/4" male VCR127 mm (5.00")
      WGMXMPRR4 1/2" male VCR127 mm (5.00")
      WGMXMPSS2 1/4" Swagelok112.7 mm (4.44")
      WGMXMPSS3 3/8" Swagelok117.9 mm (4.64)
      WGMXMSBW2 1/4" Butt weld tube 133.4 mm (5.25")
      WGMXMSBW3 3/8" butt weld tube 133.4 mm (5.25")
      WGMXMSBW4 1/2" Butt weld tube 133.4 mm (5.25")
      WGMXMSRR2 1/4" male VCR127 mm (5.00")
      WGMXMSRR4 1/2" male VCR127 mm (5.00")
        

       

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