應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!
發(fā)布日期:2025-02-05 16:02:12
應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!
應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!
應(yīng)特格ENTEGRIS氣體過(guò)濾器,WGMXMBSS2現(xiàn)貨供應(yīng)!
Compatible with all classes of semiconductor process gases
Compatible with general nitrogen and CDA applications
Materials | Filter element | Hydrophobic PTFE membrane supported by molded PFA structures |
Housing | Electropolished low sulfur 316L stainless housing | |
Downstream cleanliness | Particles | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm |
Volatiles (Silver) | <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb) | |
Removal rating | ≥0.0015 μm | |
Surface finish interior | WGMX (Bronze) MB XXXX | ≤20 μin Ra |
WGMX (Silver/Bronze Plus) MS XXX/XXX | ≤7 μin Ra | |
Helium leak rating | Qualified | 2 x 10-10 atm-cc/sec |
Tested | 1 x 10-9 atm-cc/sec | |
Operating conditions |
Maximum inlet pressure |
Silver and Bronze Plus 1⁄4" and 1⁄2" VCR® compatible fittings: 7.0 MPa (70 bar, 1015 psig) |
Bronze 1⁄4" and 1⁄2" VCR compatible fittings: 6.0 MPa (60 bar, 870 psig) | ||
Bronze and Bronze Plus 1⁄4", 3⁄8" and 1⁄2" Swagelok® compatible fitting: 6.0 MPa (60 bar, 870 psig) | ||
Maximum forward differential pressure | 7 bar (102 psid) | |
Maximum reverse differential pressure | 2.5 bar (36 psid) | |
Maximum operating temperature | 120°C (248°F) | |
Flow rating | Refer to performance data | |
Warranty | Bronze | 1 year |
Silver | 3 years | |
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) |
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