O3 Ozone 9602-7101 0 ... 1.00 ppm Exhaust
monitoring
PH3 Phosphine (2 El.) 9602-6100 0 ... 1.00 ppm
special application
PH3 Phosphine (3 El.) 9602-6101 0 ... 1.00 ppm
SiH4 Silane 9602-6300 0 ... 50.0 ppm
SO2 Sulphur Dioxide 9602-5900 0 ... 25.0 ppm
TEOS Tetraethyl Silicate 9602-7500 0 ... 100 ppm
TMB Trimethyl Borate 9602-7510 0 ... 200 ppm
TMP Trimethyl Phosphite 9602-7800 0 ... 30.0 ppm
CH4 Methane 9602-9900 0 ... 100 LEL for Satellite C
only /Standard
CH4 Methane 9602-9901 0 ... 100 LEL for Satellite C
only
CH4 Methane 9602-9902 0 ... 100 LEL for Sat-Ex C
Version
CH4 Methane 9602-9903 0 ... 100 LEL for Sat-Ex C
Version
CH4 Methane 9602-9905 0 ... 100 LEL for Sat-Ex C
Version
C4
F6 Hexafluoro-1,3-butadiene 9602-9732 0.....50.0
ppm
C5
F8 Octafluorocyclopentene 9602-9730 0 ... 20.0 ppm
CH3
F Methyl Fluoride 9602-9720 0 ... 0.500 % vol.
DCE 1,2 Di-chloro-ethylene 1,2 9602-9600 0 ... 1000?

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