Complete?detector?kit?and?sensor?cartridge?description?Kit?part?no.
Ammonia?0-100?ppm?kit?MIDAS-K-NH3
Arsine?0-0.2?ppm?and?Germane?0-0.8?ppm?kit?MIDAS-K-ASH
Boron?Trichloride?0-8?ppm,?Dichlorosilane?0-8?ppm,?Hydrogen?Bromide?0-8?ppm,?Hydrogen?Chloride?0-8?ppm?MIDAS-K-HCL
Boron?Trifluoride?0-4?ppm,?Hydrogen?Fluoride?0-12?ppm,?Nitrogen?Trifluoride?0-40?ppm?and?Tungsten?Hexafluoride?0-12?ppm?kit?MIDAS-K-HFX
Bromine?0-0.4?ppm?and?Chlorine?Dioxide?0-0.4?ppm?kit?MIDAS-K-BR2
C4F6?0-40ppm,?C5F8?0-40ppm?and?CH2F2?0-240ppm?(A?separate?pyrolyzer?module,?MIDAS-T-0P3,?must?be?ordered)?MIDAS-K-XCF
Chlorine?0-2?ppm?and?Fluorine?0-4?ppm?kit?MIDAS-K-HAL
Carbon?Dioxide?0-2.0%?v?kit?MIDAS-K-CO2
Carbon?Monoxide?0-100?ppm?kit?MIDAS-K-COX
Diborane?0-0.4?ppm?kit?MIDAS-K-B2H
Hydrogen?0-1000?ppm?kit?MIDAS-K-H2X
Hydrogen?0-100%?LEL?and?Methane?0-100%?LEL?kit?1?MIDAS-K-LEL
Hydrogen?Cyanide?0-20?ppm?kit?MIDAS-K-HCN
Hydrogen?Sulfide?0-40?ppm?kit?MIDAS-K-H2S
NF3?0-40ppm?and?CH3F?0-120ppm?(A?separate?pyrolyzer?module,?MIDAS-T-0P3,?must?be?ordered)?MIDAS-K-XHF
Nitric?Oxide?0-100?ppm?kit?MIDAS-K-NOX
Nitrogen?Dioxide?0-12?ppm?kit?MIDAS-K-NO2
Oxygen?0-25%?v?kit?MIDAS-K-O2X
Ozone?0-0.4?ppm?kit?MIDAS-K-O3X
Phosphine?0-1.2?ppm?kit?MIDAS-K-PH3
Silane?0-20?ppm?and?Disilane?0-20?ppm?kit?MIDAS-K-SHX
Silane?low?level?0-2?ppm?kit?MIDAS-K-SHL
Sulfur?Dioxide?0-8?ppm?kit?MIDAS-K-SO2
TEOS?0-40?ppm?kit?MIDAS-K-TEO?

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